NOTICE OF INTENT TO SOLE SOURCE: Large Aperture Ultra High Vacuum Rotation Stages

Background
The United States Department of Commerce (DOC), National Institute of Standards and Technology (NIST), Acquisition Management Division (AMD) intends to negotiate, on a sole source basis, with MicronixUSA for the purchase of Three (3) Large Aperture Ultra High Vacuum Rotation Stages to be utilized by NIST’s Sensor Science Division. The sole source determination is based on the need to acquire three (3) Large Aperture Ultra High Vacuum Rotation Stages for a EUV Scatterometry project to advance the CHIPS mission of developing new metrology techniques for enabling the manufacture of advanced semiconductor devices. Market research determined that MicronixUSA is the sole manufacturer and distributor of the equipment that meets the required minimum specifications.

Work Details
Minimum Requirements: Description: Motorized UHV rotation stages Quantity: 3 Technical Specifications: Rated for Ultra-high Vacuum (UHV), allows a minimum of one full rotation, maximum rotation speed of ≥ 1 °/s, UHV compatible quadrature encoder with resolution of 2 µrad or better, open aperture of ≥ 110 mm in diameter, size no larger than 200 mm x 200 mm x 40 mm. In-vacuum cabling: 1.5 m in length, connectorized compatible with line item 0003. Condition and packaging: Stages and in-vacuum accessories must be cleaned and bagged for UHV service.
Description: Stage Controller Quantity: 1 Technical Specifications: Suitable for software-controlled operation of line item 0001, operates in atmosphere, includes Windows compatible GUI software and Labview Virtual Instruments for end user integration, controller to computer communication done via USB, Ethernet, GPIB or serial connection(s). Description: Feedthrough flange Quantity: 1 Technical Specifications: Single 6” conflat flange with electrical feedthrough(s), suitable for connection of Line item 0001 to 0002. Condition and packaging: Stages and in-vacuum accessories must be cleaned and bagged for UHV service.